CA2218876A1 - Elastomeric micro electro mechanical systems - Google Patents

Elastomeric micro electro mechanical systems

Info

Publication number
CA2218876A1
CA2218876A1 CA2218876A CA2218876A CA2218876A1 CA 2218876 A1 CA2218876 A1 CA 2218876A1 CA 2218876 A CA2218876 A CA 2218876A CA 2218876 A CA2218876 A CA 2218876A CA 2218876 A1 CA2218876 A1 CA 2218876A1
Authority
CA
Canada
Prior art keywords
microelectrodes
macroelectrode
mechanical systems
electro mechanical
micro electro
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA2218876A
Other languages
French (fr)
Other versions
CA2218876C (en
Inventor
Lorne A. Whitehead
Brent J. Bolleman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of British Columbia
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of CA2218876A1 publication Critical patent/CA2218876A1/en
Application granted granted Critical
Publication of CA2218876C publication Critical patent/CA2218876C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means

Abstract

An electromechanical transducer having a substrate (4) bearing a plurality of elastomeric microstructures (5) with a microelectrode (6) on each microstructure. A power supply (11) is connected to the microelectrodes for controlled application to them of an electrical potential which alternately induces forces of attraction between adjacent pairs of microelectrodes, causing controlled, time-varying displacement of the microelectrodes.
Alternatively, a further plurality of microelectrodes (14), or one or more macroelectrodes (32), are elastomerically supported above the microelectrodes, with the power supply being connected to the macroelectrode(s) such that the electrical potential applied between the microelectrodes and macroelectrode(s) alternately induces forces of attraction between the microelectrodes and macroelectrode(s), causing controlled, time-varying displacement of the microelectrodes relative to the macroelectrode(s). The macroelectrode(s) can also be applied to a side of the substrate opposite the microstructures.
CA002218876A 1995-05-01 1996-04-26 Elastomeric micro electro mechanical systems Expired - Fee Related CA2218876C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/431,735 US5642015A (en) 1993-07-14 1995-05-01 Elastomeric micro electro mechanical systems
US08/431,735 1995-05-01
PCT/CA1996/000268 WO1996034701A1 (en) 1995-05-01 1996-04-26 Elastomeric micro electromechanical systems

Publications (2)

Publication Number Publication Date
CA2218876A1 true CA2218876A1 (en) 1996-11-07
CA2218876C CA2218876C (en) 1999-12-07

Family

ID=23713203

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002218876A Expired - Fee Related CA2218876C (en) 1995-05-01 1996-04-26 Elastomeric micro electro mechanical systems

Country Status (9)

Country Link
US (1) US5642015A (en)
EP (1) EP0824381B1 (en)
JP (1) JP3016870B2 (en)
KR (1) KR100286486B1 (en)
CN (1) CN1047107C (en)
AU (1) AU5394596A (en)
CA (1) CA2218876C (en)
DE (1) DE69609414T2 (en)
WO (1) WO1996034701A1 (en)

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EP0824381A1 (en) 1998-02-25
JPH10511528A (en) 1998-11-04
CN1047107C (en) 1999-12-08
EP0824381B1 (en) 2000-07-19
CN1186458A (en) 1998-07-01
DE69609414T2 (en) 2001-03-08
KR100286486B1 (en) 2001-04-16
KR19990008212A (en) 1999-01-25
DE69609414D1 (en) 2000-08-24
CA2218876C (en) 1999-12-07
MX9708359A (en) 1998-06-30
AU5394596A (en) 1996-11-21
WO1996034701A1 (en) 1996-11-07
US5642015A (en) 1997-06-24
JP3016870B2 (en) 2000-03-06

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