DE69609414T2 - Elastomeres mikroelektromekanisches system - Google Patents

Elastomeres mikroelektromekanisches system

Info

Publication number
DE69609414T2
DE69609414T2 DE69609414T DE69609414T DE69609414T2 DE 69609414 T2 DE69609414 T2 DE 69609414T2 DE 69609414 T DE69609414 T DE 69609414T DE 69609414 T DE69609414 T DE 69609414T DE 69609414 T2 DE69609414 T2 DE 69609414T2
Authority
DE
Germany
Prior art keywords
microelectromecanic
elastomeric
microelectromecanic system
elastomeric microelectromecanic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69609414T
Other languages
English (en)
Other versions
DE69609414D1 (de
Inventor
A Whitehead
J Bolleman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of British Columbia
Original Assignee
University of British Columbia
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of British Columbia filed Critical University of British Columbia
Application granted granted Critical
Publication of DE69609414D1 publication Critical patent/DE69609414D1/de
Publication of DE69609414T2 publication Critical patent/DE69609414T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
DE69609414T 1995-05-01 1996-04-26 Elastomeres mikroelektromekanisches system Expired - Fee Related DE69609414T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/431,735 US5642015A (en) 1993-07-14 1995-05-01 Elastomeric micro electro mechanical systems
PCT/CA1996/000268 WO1996034701A1 (en) 1995-05-01 1996-04-26 Elastomeric micro electromechanical systems

Publications (2)

Publication Number Publication Date
DE69609414D1 DE69609414D1 (de) 2000-08-24
DE69609414T2 true DE69609414T2 (de) 2001-03-08

Family

ID=23713203

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69609414T Expired - Fee Related DE69609414T2 (de) 1995-05-01 1996-04-26 Elastomeres mikroelektromekanisches system

Country Status (9)

Country Link
US (1) US5642015A (de)
EP (1) EP0824381B1 (de)
JP (1) JP3016870B2 (de)
KR (1) KR100286486B1 (de)
CN (1) CN1047107C (de)
AU (1) AU5394596A (de)
CA (1) CA2218876C (de)
DE (1) DE69609414T2 (de)
WO (1) WO1996034701A1 (de)

Families Citing this family (182)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6812624B1 (en) * 1999-07-20 2004-11-02 Sri International Electroactive polymers
US7320457B2 (en) * 1997-02-07 2008-01-22 Sri International Electroactive polymer devices for controlling fluid flow
US6545384B1 (en) 1997-02-07 2003-04-08 Sri International Electroactive polymer devices
US6376971B1 (en) 1997-02-07 2002-04-23 Sri International Electroactive polymer electrodes
US6781284B1 (en) 1997-02-07 2004-08-24 Sri International Electroactive polymer transducers and actuators
US6833242B2 (en) * 1997-09-23 2004-12-21 California Institute Of Technology Methods for detecting and sorting polynucleotides based on size
US7214298B2 (en) * 1997-09-23 2007-05-08 California Institute Of Technology Microfabricated cell sorter
DE19825581A1 (de) * 1998-06-09 1999-12-16 Volkswagen Ag Ultraschall-Folien-Wandler
US6216973B1 (en) 1998-10-23 2001-04-17 Trw Vehicle Safety Systems Inc. Electric locking seat belt retractor
US6184607B1 (en) * 1998-12-29 2001-02-06 Honeywell International Inc. Driving strategy for non-parallel arrays of electrostatic actuators sharing a common electrode
US6184608B1 (en) 1998-12-29 2001-02-06 Honeywell International Inc. Polymer microactuator array with macroscopic force and displacement
US6297069B1 (en) 1999-01-28 2001-10-02 Honeywell Inc. Method for supporting during fabrication mechanical members of semi-conductive dies, wafers, and devices and an associated intermediate device assembly
US20030022383A1 (en) * 1999-04-06 2003-01-30 Uab Research Foundation Method for screening crystallization conditions in solution crystal growth
US7244396B2 (en) * 1999-04-06 2007-07-17 Uab Research Foundation Method for preparation of microarrays for screening of crystal growth conditions
ATE357656T1 (de) * 1999-04-06 2007-04-15 Univ Alabama Res Found Vorrichtung zum screening von kristallisierungsbedingungen in lösungen zur kristallzüchtung
US7247490B2 (en) * 1999-04-06 2007-07-24 Uab Research Foundation Method for screening crystallization conditions in solution crystal growth
US7214540B2 (en) 1999-04-06 2007-05-08 Uab Research Foundation Method for screening crystallization conditions in solution crystal growth
US7250305B2 (en) * 2001-07-30 2007-07-31 Uab Research Foundation Use of dye to distinguish salt and protein crystals under microcrystallization conditions
US6166478A (en) * 1999-06-04 2000-12-26 The Board Of Trustees Of The University Of Illinois Method for assembly of microelectromechanical systems using magnetic actuation
US6899137B2 (en) * 1999-06-28 2005-05-31 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US7244402B2 (en) * 2001-04-06 2007-07-17 California Institute Of Technology Microfluidic protein crystallography
US7195670B2 (en) * 2000-06-27 2007-03-27 California Institute Of Technology High throughput screening of crystallization of materials
US7459022B2 (en) * 2001-04-06 2008-12-02 California Institute Of Technology Microfluidic protein crystallography
US8550119B2 (en) * 1999-06-28 2013-10-08 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US8052792B2 (en) * 2001-04-06 2011-11-08 California Institute Of Technology Microfluidic protein crystallography techniques
CA2721172C (en) * 1999-06-28 2012-04-10 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US7144616B1 (en) * 1999-06-28 2006-12-05 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US6929030B2 (en) * 1999-06-28 2005-08-16 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US7217321B2 (en) * 2001-04-06 2007-05-15 California Institute Of Technology Microfluidic protein crystallography techniques
US7306672B2 (en) * 2001-04-06 2007-12-11 California Institute Of Technology Microfluidic free interface diffusion techniques
US20080277007A1 (en) * 1999-06-28 2008-11-13 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US8709153B2 (en) 1999-06-28 2014-04-29 California Institute Of Technology Microfludic protein crystallography techniques
US7052545B2 (en) * 2001-04-06 2006-05-30 California Institute Of Technology High throughput screening of crystallization of materials
US6664718B2 (en) 2000-02-09 2003-12-16 Sri International Monolithic electroactive polymers
US7064472B2 (en) * 1999-07-20 2006-06-20 Sri International Electroactive polymer devices for moving fluid
DE60037433T2 (de) 1999-07-20 2008-12-04 Sri International, Menlo Park Elektroaktive Polymergeneratoren
US7537197B2 (en) * 1999-07-20 2009-05-26 Sri International Electroactive polymer devices for controlling fluid flow
FR2803957B1 (fr) * 2000-01-13 2002-03-08 Information Technology Dev Micro-actionneur capacitif a structure deformable optimise pour memoire a disques et procede de fabrication
US6753638B2 (en) 2000-02-03 2004-06-22 Calient Networks, Inc. Electrostatic actuator for micromechanical systems
US6911764B2 (en) 2000-02-09 2005-06-28 Sri International Energy efficient electroactive polymers and electroactive polymer devices
AU2001238459A1 (en) * 2000-02-16 2001-08-27 Omlidon Technologies Llc Method for microstructuring polymer-supported materials
AU2001238675A1 (en) * 2000-02-23 2001-09-03 Sri International Electroactive polymer thermal electric generators
US6768246B2 (en) * 2000-02-23 2004-07-27 Sri International Biologically powered electroactive polymer generators
AU2001240040A1 (en) * 2000-03-03 2001-09-17 California Institute Of Technology Combinatorial array for nucleic acid analysis
WO2001075438A2 (en) * 2000-03-31 2001-10-11 Lifescan, Inc. Electrically-conductive patterns for monitoring the filling of medical devices
US7867763B2 (en) 2004-01-25 2011-01-11 Fluidigm Corporation Integrated chip carriers with thermocycler interfaces and methods of using the same
US20050118073A1 (en) * 2003-11-26 2005-06-02 Fluidigm Corporation Devices and methods for holding microfluidic devices
US6628041B2 (en) * 2000-05-16 2003-09-30 Calient Networks, Inc. Micro-electro-mechanical-system (MEMS) mirror device having large angle out of plane motion using shaped combed finger actuators and method for fabricating the same
US6837476B2 (en) 2002-06-19 2005-01-04 Honeywell International Inc. Electrostatically actuated valve
US7420659B1 (en) * 2000-06-02 2008-09-02 Honeywell Interantional Inc. Flow control system of a cartridge
US6568286B1 (en) 2000-06-02 2003-05-27 Honeywell International Inc. 3D array of integrated cells for the sampling and detection of air bound chemical and biological species
US7351376B1 (en) * 2000-06-05 2008-04-01 California Institute Of Technology Integrated active flux microfluidic devices and methods
US6829753B2 (en) * 2000-06-27 2004-12-07 Fluidigm Corporation Microfluidic design automation method and system
US7000330B2 (en) * 2002-08-21 2006-02-21 Honeywell International Inc. Method and apparatus for receiving a removable media member
EP1322030A1 (de) 2000-08-11 2003-06-25 Ecchandes Inc. Piezoelektrischer stator des überlappungstyps, piezoelektrischer antrieb des überlappungstyps und anwendungen dafür
EP1334347A1 (de) 2000-09-15 2003-08-13 California Institute Of Technology Miniaturisierte querstromvorrichtungen und -verfahren
US6842964B1 (en) 2000-09-29 2005-01-18 Tucker Davis Technologies, Inc. Process of manufacturing of electrostatic speakers
US6825967B1 (en) 2000-09-29 2004-11-30 Calient Networks, Inc. Shaped electrodes for micro-electro-mechanical-system (MEMS) devices to improve actuator performance and methods for fabricating the same
US7678547B2 (en) * 2000-10-03 2010-03-16 California Institute Of Technology Velocity independent analyte characterization
US7097809B2 (en) * 2000-10-03 2006-08-29 California Institute Of Technology Combinatorial synthesis system
US7258774B2 (en) * 2000-10-03 2007-08-21 California Institute Of Technology Microfluidic devices and methods of use
AU1189702A (en) * 2000-10-13 2002-04-22 Fluidigm Corp Microfluidic device based sample injection system for analytical devices
DE10054247C2 (de) * 2000-11-02 2002-10-24 Danfoss As Betätigungselement und Verfahren zu seiner Herstellung
US7548015B2 (en) * 2000-11-02 2009-06-16 Danfoss A/S Multilayer composite and a method of making such
US8181338B2 (en) 2000-11-02 2012-05-22 Danfoss A/S Method of making a multilayer composite
US7518284B2 (en) 2000-11-02 2009-04-14 Danfoss A/S Dielectric composite and a method of manufacturing a dielectric composite
US7400080B2 (en) * 2002-09-20 2008-07-15 Danfoss A/S Elastomer actuator and a method of making an actuator
WO2002065005A1 (en) * 2000-11-06 2002-08-22 California Institute Of Technology Electrostatic valves for microfluidic devices
AU2002248149A1 (en) * 2000-11-16 2002-08-12 Fluidigm Corporation Microfluidic devices for introducing and dispensing fluids from microfluidic systems
EP1343973B2 (de) 2000-11-16 2020-09-16 California Institute Of Technology Vorrichtung und verfahren zur durchführung von assays und screening mit hohem durchsatz
US20050196785A1 (en) * 2001-03-05 2005-09-08 California Institute Of Technology Combinational array for nucleic acid analysis
US7670429B2 (en) * 2001-04-05 2010-03-02 The California Institute Of Technology High throughput screening of crystallization of materials
AU2002307152A1 (en) 2001-04-06 2002-10-21 California Institute Of Technology Nucleic acid amplification utilizing microfluidic devices
US6752922B2 (en) * 2001-04-06 2004-06-22 Fluidigm Corporation Microfluidic chromatography
US20020164816A1 (en) * 2001-04-06 2002-11-07 California Institute Of Technology Microfluidic sample separation device
DE60239328D1 (de) 2001-04-06 2011-04-14 Fluidigm Corp Polymeroberflächenmodifikation
US6802342B2 (en) * 2001-04-06 2004-10-12 Fluidigm Corporation Microfabricated fluidic circuit elements and applications
US7233097B2 (en) * 2001-05-22 2007-06-19 Sri International Rolled electroactive polymers
US6543087B2 (en) 2001-06-01 2003-04-08 Aip Networks, Inc. Micro-electromechanical hinged flap structure
US20050149304A1 (en) * 2001-06-27 2005-07-07 Fluidigm Corporation Object oriented microfluidic design method and system
US7075162B2 (en) * 2001-08-30 2006-07-11 Fluidigm Corporation Electrostatic/electrostrictive actuation of elastomer structures using compliant electrodes
US6729856B2 (en) 2001-10-09 2004-05-04 Honeywell International Inc. Electrostatically actuated pump with elastic restoring forces
US7192629B2 (en) 2001-10-11 2007-03-20 California Institute Of Technology Devices utilizing self-assembled gel and method of manufacture
US8440093B1 (en) 2001-10-26 2013-05-14 Fuidigm Corporation Methods and devices for electronic and magnetic sensing of the contents of microfluidic flow channels
US7064740B2 (en) * 2001-11-09 2006-06-20 Sharp Laboratories Of America, Inc. Backlit display with improved dynamic range
US7691333B2 (en) * 2001-11-30 2010-04-06 Fluidigm Corporation Microfluidic device and methods of using same
EP1463796B1 (de) 2001-11-30 2013-01-09 Fluidigm Corporation Mikrofluidische vorrichtung und verfahren zu ihrer verwendung
ES2299614T3 (es) * 2001-12-21 2008-06-01 Danfoss A/S Estructura de dispositivo dielectrico de accionamiento o deteccion y metodo para fabricar el mismo.
US7312085B2 (en) * 2002-04-01 2007-12-25 Fluidigm Corporation Microfluidic particle-analysis systems
EP1499706A4 (de) 2002-04-01 2010-11-03 Fluidigm Corp Mikrofluidische partikelanalysesysteme
US20070026528A1 (en) * 2002-05-30 2007-02-01 Delucas Lawrence J Method for screening crystallization conditions in solution crystal growth
AU2002316298A1 (en) * 2002-06-14 2003-12-31 International Business Machines Corporation Micro-electromechanical switch having a deformable elastomeric conductive element
US20040007672A1 (en) * 2002-07-10 2004-01-15 Delucas Lawrence J. Method for distinguishing between biomolecule and non-biomolecule crystals
EP1551753A2 (de) * 2002-09-25 2005-07-13 California Institute Of Technology Hochintegriertes mikrofluidisches netzwerk
US8220494B2 (en) * 2002-09-25 2012-07-17 California Institute Of Technology Microfluidic large scale integration
JP5695287B2 (ja) 2002-10-02 2015-04-01 カリフォルニア インスティテュート オブ テクノロジー 微小流体の核酸解析
EP1570415B1 (de) * 2002-12-12 2009-08-19 Danfoss A/S Berührungssensorelement und sensorgruppe
ATE398988T1 (de) 2003-02-24 2008-07-15 Danfoss As Elektroaktive elastische kompressionsbandage
US7666361B2 (en) * 2003-04-03 2010-02-23 Fluidigm Corporation Microfluidic devices and methods of using same
US7604965B2 (en) 2003-04-03 2009-10-20 Fluidigm Corporation Thermal reaction device and method for using the same
US7476363B2 (en) * 2003-04-03 2009-01-13 Fluidigm Corporation Microfluidic devices and methods of using same
US8828663B2 (en) 2005-03-18 2014-09-09 Fluidigm Corporation Thermal reaction device and method for using the same
US20050145496A1 (en) 2003-04-03 2005-07-07 Federico Goodsaid Thermal reaction device and method for using the same
WO2004094020A2 (en) * 2003-04-17 2004-11-04 Fluidigm Corporation Crystal growth devices and systems, and methods for using same
CA2526368A1 (en) * 2003-05-20 2004-12-02 Fluidigm Corporation Method and system for microfluidic device and imaging thereof
SG145697A1 (en) * 2003-07-28 2008-09-29 Fluidigm Corp Image processing method and system for microfluidic devices
US7413712B2 (en) 2003-08-11 2008-08-19 California Institute Of Technology Microfluidic rotary flow reactor matrix
WO2005052673A2 (en) 2003-11-21 2005-06-09 Sharp Laboratories Of America, Inc. Liquid crystal display with adaptive color
JP4757201B2 (ja) * 2003-12-18 2011-08-24 シャープ株式会社 液晶ディスプレイのためのダイナミックガンマ
US7407799B2 (en) * 2004-01-16 2008-08-05 California Institute Of Technology Microfluidic chemostat
WO2005072353A2 (en) * 2004-01-25 2005-08-11 Fluidigm Corporation Crystal forming devices and systems and methods for making and using the same
US7777714B2 (en) 2004-05-04 2010-08-17 Sharp Laboratories Of America, Inc. Liquid crystal display with adaptive width
US7602369B2 (en) * 2004-05-04 2009-10-13 Sharp Laboratories Of America, Inc. Liquid crystal display with colored backlight
US7505018B2 (en) 2004-05-04 2009-03-17 Sharp Laboratories Of America, Inc. Liquid crystal display with reduced black level insertion
US8395577B2 (en) 2004-05-04 2013-03-12 Sharp Laboratories Of America, Inc. Liquid crystal display with illumination control
US7532192B2 (en) 2004-05-04 2009-05-12 Sharp Laboratories Of America, Inc. Liquid crystal display with filtered black point
US7872631B2 (en) 2004-05-04 2011-01-18 Sharp Laboratories Of America, Inc. Liquid crystal display with temporal black point
US7612757B2 (en) 2004-05-04 2009-11-03 Sharp Laboratories Of America, Inc. Liquid crystal display with modulated black point
US20060024751A1 (en) * 2004-06-03 2006-02-02 Fluidigm Corporation Scale-up methods and systems for performing the same
US7023451B2 (en) * 2004-06-14 2006-04-04 Sharp Laboratories Of America, Inc. System for reducing crosstalk
US7116463B2 (en) * 2004-07-15 2006-10-03 Optron Systems, Inc. High angular deflection micro-mirror system
US7898519B2 (en) 2005-02-17 2011-03-01 Sharp Laboratories Of America, Inc. Method for overdriving a backlit display
US8050512B2 (en) 2004-11-16 2011-11-01 Sharp Laboratories Of America, Inc. High dynamic range images from low dynamic range images
US8050511B2 (en) 2004-11-16 2011-11-01 Sharp Laboratories Of America, Inc. High dynamic range images from low dynamic range images
US7525528B2 (en) 2004-11-16 2009-04-28 Sharp Laboratories Of America, Inc. Technique that preserves specular highlights
US20060134510A1 (en) * 2004-12-21 2006-06-22 Cleopatra Cabuz Air cell air flow control system and method
US7222639B2 (en) * 2004-12-29 2007-05-29 Honeywell International Inc. Electrostatically actuated gas valve
US7328882B2 (en) * 2005-01-06 2008-02-12 Honeywell International Inc. Microfluidic modulating valve
US7445017B2 (en) * 2005-01-28 2008-11-04 Honeywell International Inc. Mesovalve modulator
US7320338B2 (en) * 2005-06-03 2008-01-22 Honeywell International Inc. Microvalve package assembly
US7517201B2 (en) * 2005-07-14 2009-04-14 Honeywell International Inc. Asymmetric dual diaphragm pump
US20070051415A1 (en) * 2005-09-07 2007-03-08 Honeywell International Inc. Microvalve switching array
US7624755B2 (en) 2005-12-09 2009-12-01 Honeywell International Inc. Gas valve with overtravel
US9143657B2 (en) 2006-01-24 2015-09-22 Sharp Laboratories Of America, Inc. Color enhancement technique using skin color detection
US8121401B2 (en) 2006-01-24 2012-02-21 Sharp Labortories of America, Inc. Method for reducing enhancement of artifacts and noise in image color enhancement
US7815868B1 (en) 2006-02-28 2010-10-19 Fluidigm Corporation Microfluidic reaction apparatus for high throughput screening
US7523762B2 (en) 2006-03-22 2009-04-28 Honeywell International Inc. Modulating gas valves and systems
US8007704B2 (en) * 2006-07-20 2011-08-30 Honeywell International Inc. Insert molded actuator components
US7543604B2 (en) * 2006-09-11 2009-06-09 Honeywell International Inc. Control valve
US7732999B2 (en) * 2006-11-03 2010-06-08 Danfoss A/S Direct acting capacitive transducer
US7880371B2 (en) * 2006-11-03 2011-02-01 Danfoss A/S Dielectric composite and a method of manufacturing a dielectric composite
US7644731B2 (en) 2006-11-30 2010-01-12 Honeywell International Inc. Gas valve with resilient seat
US8941580B2 (en) 2006-11-30 2015-01-27 Sharp Laboratories Of America, Inc. Liquid crystal display with area adaptive backlight
EP1970122A1 (de) * 2007-03-12 2008-09-17 Koninklijke Philips Electronics N.V. Mikrofluidisches System auf der Basis von magnetischen Aktuatorelementen
EP2174360A4 (de) 2007-06-29 2013-12-11 Artificial Muscle Inc Wandler mit elektroaktivem polymer für anwendungen der sensorischen rückmeldung
CN102084133A (zh) * 2008-04-30 2011-06-01 丹佛斯强力聚合公司 由聚合物换能器提供动力的泵
WO2009132650A2 (en) * 2008-04-30 2009-11-05 Danfoss A/S A power actuated valve
US8591206B2 (en) * 2008-12-06 2013-11-26 Thomas R. Krenik Air cycle heat pump techniques and system
EP2239793A1 (de) 2009-04-11 2010-10-13 Bayer MaterialScience AG Elektrisch schaltbarer Polymerfilmaufbau und dessen Verwendung
US8712559B2 (en) * 2010-02-10 2014-04-29 The Board Of Trustees Of The University Of Illionois Adaptive control for uncertain nonlinear multi-input multi-output systems
JP5548563B2 (ja) * 2010-09-14 2014-07-16 ヤマハ株式会社 ナノシートトランスデューサ
CA2828809A1 (en) 2011-03-01 2012-09-07 Francois EGRON Automated manufacturing processes for producing deformable polymer devices and films
CN103703404A (zh) 2011-03-22 2014-04-02 拜耳知识产权有限责任公司 电活化聚合物致动器双凸透镜系统
US9557059B2 (en) 2011-12-15 2017-01-31 Honeywell International Inc Gas valve with communication link
US8839815B2 (en) 2011-12-15 2014-09-23 Honeywell International Inc. Gas valve with electronic cycle counter
US9846440B2 (en) 2011-12-15 2017-12-19 Honeywell International Inc. Valve controller configured to estimate fuel comsumption
US9074770B2 (en) 2011-12-15 2015-07-07 Honeywell International Inc. Gas valve with electronic valve proving system
US9995486B2 (en) 2011-12-15 2018-06-12 Honeywell International Inc. Gas valve with high/low gas pressure detection
US9851103B2 (en) 2011-12-15 2017-12-26 Honeywell International Inc. Gas valve with overpressure diagnostics
US8899264B2 (en) 2011-12-15 2014-12-02 Honeywell International Inc. Gas valve with electronic proof of closure system
US8905063B2 (en) 2011-12-15 2014-12-09 Honeywell International Inc. Gas valve with fuel rate monitor
US9835265B2 (en) 2011-12-15 2017-12-05 Honeywell International Inc. Valve with actuator diagnostics
US8947242B2 (en) 2011-12-15 2015-02-03 Honeywell International Inc. Gas valve with valve leakage test
US8692442B2 (en) 2012-02-14 2014-04-08 Danfoss Polypower A/S Polymer transducer and a connector for a transducer
US8891222B2 (en) 2012-02-14 2014-11-18 Danfoss A/S Capacitive transducer and a method for manufacturing a transducer
WO2013142552A1 (en) 2012-03-21 2013-09-26 Bayer Materialscience Ag Roll-to-roll manufacturing processes for producing self-healing electroactive polymer devices
US9761790B2 (en) 2012-06-18 2017-09-12 Parker-Hannifin Corporation Stretch frame for stretching process
US9234661B2 (en) 2012-09-15 2016-01-12 Honeywell International Inc. Burner control system
US10422531B2 (en) 2012-09-15 2019-09-24 Honeywell International Inc. System and approach for controlling a combustion chamber
WO2014066576A1 (en) 2012-10-24 2014-05-01 Bayer Intellectual Property Gmbh Polymer diode
JP6180547B2 (ja) * 2013-01-29 2017-08-16 中国科学院蘇州納米技術与納米倣生研究所Ｓｕｚｈｏｕ Ｉｎｓｔｉｔｕｔｅ Ｏｆ Ｎａｎｏ−Ｔｅｃｈ Ａｎｄ Ｎａｎｏ−Ｂｉｏｎｉｃｓ（Ｓｉｎａｎｏ），Ｃｈｉｎｅｓｅ Ａｃａｄｅｍｙ Ｏｆ Ｓｃｉｅｎｃｅ 電子皮膚及びその製造方法と使用
EP2868970B1 (de) 2013-10-29 2020-04-22 Honeywell Technologies Sarl Regelungsvorrichtung
US10024439B2 (en) 2013-12-16 2018-07-17 Honeywell International Inc. Valve over-travel mechanism
US9841122B2 (en) 2014-09-09 2017-12-12 Honeywell International Inc. Gas valve with electronic valve proving system
US9645584B2 (en) 2014-09-17 2017-05-09 Honeywell International Inc. Gas valve with electronic health monitoring
US9899937B2 (en) * 2015-01-16 2018-02-20 Wisconsin Alumni Research Foundation Peg-style electrostatic rotating machine
US10503181B2 (en) 2016-01-13 2019-12-10 Honeywell International Inc. Pressure regulator
US10564062B2 (en) 2016-10-19 2020-02-18 Honeywell International Inc. Human-machine interface for gas valve
US11073281B2 (en) 2017-12-29 2021-07-27 Honeywell International Inc. Closed-loop programming and control of a combustion appliance
US10697815B2 (en) 2018-06-09 2020-06-30 Honeywell International Inc. System and methods for mitigating condensation in a sensor module
WO2020097730A1 (en) * 2018-11-16 2020-05-22 The University Of British Columbia Deformable sensor for simulating skin and other applications
US11713240B2 (en) * 2019-12-09 2023-08-01 Board Of Regents, The University Of Texas System Cellular array electrostatic actuator

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3772537A (en) * 1972-10-27 1973-11-13 Trw Inc Electrostatically actuated device
US4376302A (en) * 1978-04-13 1983-03-08 The United States Of America As Represented By The Secretary Of The Navy Piezoelectric polymer hydrophone
US4654546A (en) * 1984-11-20 1987-03-31 Kari Kirjavainen Electromechanical film and procedure for manufacturing same
CA1277415C (en) * 1986-04-11 1990-12-04 Lorne A. Whitehead Elastomer membrane enhanced electrostatic transducer
US4887248A (en) * 1988-07-07 1989-12-12 Cleveland Machine Controls, Inc. Electrostatic transducer and method of making and using same
JP2797146B2 (ja) * 1990-10-09 1998-09-17 株式会社ゼクセル 物体移動用電磁アクチュエータ
US5206557A (en) * 1990-11-27 1993-04-27 Mcnc Microelectromechanical transducer and fabrication method
US5485437A (en) * 1993-02-05 1996-01-16 Discovision Associates Shock-resistant, electrostatically actuated pick-up for optical recording and playback
US5450498A (en) * 1993-07-14 1995-09-12 The University Of British Columbia High pressure low impedance electrostatic transducer
US5359574A (en) * 1993-08-27 1994-10-25 The United States Of America As Represented By The Secretary Of The Navy Electromagnetically activated compliant wavy-wall
US5395592A (en) * 1993-10-04 1995-03-07 Bolleman; Brent Acoustic liquid processing device

Also Published As

Publication number Publication date
EP0824381A1 (de) 1998-02-25
JPH10511528A (ja) 1998-11-04
CN1047107C (zh) 1999-12-08
EP0824381B1 (de) 2000-07-19
CN1186458A (zh) 1998-07-01
KR100286486B1 (ko) 2001-04-16
KR19990008212A (ko) 1999-01-25
CA2218876A1 (en) 1996-11-07
DE69609414D1 (de) 2000-08-24
CA2218876C (en) 1999-12-07
MX9708359A (es) 1998-06-30
AU5394596A (en) 1996-11-21
WO1996034701A1 (en) 1996-11-07
US5642015A (en) 1997-06-24
JP3016870B2 (ja) 2000-03-06

Similar Documents

Publication Publication Date Title
DE69609414D1 (de) Elastomeres mikroelektromekanisches system
DE69514389T2 (de) Verbindungssystem
DE69611918D1 (de) Verbindungssystem
DE69623712T2 (de) Schnittsystem
FI20116241A (fi) Monipiste-pisteeseen tietoliikennejärjestelmä
DE69521063T2 (de) Befestigungssystem
DE69620588T2 (de) Kommunikationssystem
DE69533618D1 (de) Kommunikationssystem
DE69635434D1 (de) Telekommunikationssystem
ID19591A (id) Elastomer elastomer poliuretan
DE69635072D1 (de) Telekommunikationssystem
DE59611410D1 (de) Kommunikationssystem
DE69612961D1 (de) Telekommunikationssystem
DE19681134T1 (de) Kommunikationssystem
ATA43196A (de) Pyrometallurgisches system
DE69603292D1 (de) Befestigungssystem
DE29500121U1 (de) Entwässerungssystem
DE29504372U1 (de) Verbindungssystem
DE69502653T2 (de) Verformbares System
DE59601254D1 (de) Kommunikationssystem
DE69622638T2 (de) Kommunikationssystem
DE59602041D1 (de) Kommunikationsanlage
DE19681388T1 (de) Kommunikationssystem
DE29517915U1 (de) Installationssystem
DE59606896D1 (de) Telekommunikationssystem

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee