EP1535296A4 - Micro-electromechanical switch having a deformable elastomeric conductive element - Google Patents

Micro-electromechanical switch having a deformable elastomeric conductive element

Info

Publication number
EP1535296A4
EP1535296A4 EP02746591A EP02746591A EP1535296A4 EP 1535296 A4 EP1535296 A4 EP 1535296A4 EP 02746591 A EP02746591 A EP 02746591A EP 02746591 A EP02746591 A EP 02746591A EP 1535296 A4 EP1535296 A4 EP 1535296A4
Authority
EP
European Patent Office
Prior art keywords
micro
conductive element
electromechanical switch
deformable elastomeric
elastomeric conductive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP02746591A
Other languages
German (de)
French (fr)
Other versions
EP1535296A1 (en
Inventor
Hariklia Deligianni
David R Greenberg
Christopher V Jahnes
Jennifer L Lund
Katherine L Saenger
Richard P Volant
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of EP1535296A1 publication Critical patent/EP1535296A1/en
Publication of EP1535296A4 publication Critical patent/EP1535296A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
EP02746591A 2002-06-14 2002-06-14 Micro-electromechanical switch having a deformable elastomeric conductive element Withdrawn EP1535296A4 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US2002/019449 WO2003107372A1 (en) 2002-06-14 2002-06-14 Micro-electromechanical switch having a deformable elastomeric conductive element

Publications (2)

Publication Number Publication Date
EP1535296A1 EP1535296A1 (en) 2005-06-01
EP1535296A4 true EP1535296A4 (en) 2007-04-04

Family

ID=29731345

Family Applications (1)

Application Number Title Priority Date Filing Date
EP02746591A Withdrawn EP1535296A4 (en) 2002-06-14 2002-06-14 Micro-electromechanical switch having a deformable elastomeric conductive element

Country Status (4)

Country Link
EP (1) EP1535296A4 (en)
CN (1) CN1316531C (en)
AU (1) AU2002316298A1 (en)
WO (1) WO2003107372A1 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4414263B2 (en) * 2004-03-31 2010-02-10 富士通株式会社 Microswitching device and method for manufacturing microswitching device
US7265019B2 (en) * 2004-06-30 2007-09-04 International Business Machines Corporation Elastomeric CMOS based micro electromechanical varactor
US8206552B2 (en) * 2008-06-25 2012-06-26 Applied Materials, Inc. RF power delivery system in a semiconductor apparatus
US9700712B2 (en) 2009-01-26 2017-07-11 Arizona Board Of Regents, A Body Corporate Of The State Of Arizona Acting For And On Behalf Of Arizona State University Dipolar antenna system and related methods
WO2010135634A2 (en) * 2009-05-22 2010-11-25 Arizona Board Of Regents For And On Behalf Of Arizona State University Systems, and methods for neurostimulation and neurotelemetry using semiconductor diode systems
NL2003681C2 (en) * 2009-10-21 2011-04-26 Stichting Materials Innovation Inst M2I Micro electromechanical switch and method of manufacturing such a micro electromechanical switch.
US8933496B2 (en) * 2010-11-05 2015-01-13 Massachusetts Institute Of Technology Electronically controlled squishable composite switch
CN102142335A (en) * 2010-12-24 2011-08-03 东南大学 Radio frequency switch
CN113466935A (en) * 2021-06-30 2021-10-01 中国建筑第八工程局有限公司 Trigger type detection device for deformation threshold detection and detection method thereof
FR3138657A1 (en) 2022-08-08 2024-02-09 Airmems Multi-deformation MEMS switch and switch comprising one or more MEMS switches

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5642015A (en) * 1993-07-14 1997-06-24 The University Of British Columbia Elastomeric micro electro mechanical systems
US6020564A (en) * 1998-06-04 2000-02-01 Wang Electro-Opto Corporation Low-voltage long life electrostatic microelectromechanical system switches for radio-frequency applications

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3512045A (en) * 1968-06-28 1970-05-12 Gen Signal Corp Ground fault responsive apparatus for electric power distribution apparatus
US4093977A (en) * 1976-06-15 1978-06-06 Westinghouse Electric Corp. Ground fault protective device
US6391675B1 (en) * 1998-11-25 2002-05-21 Raytheon Company Method and apparatus for switching high frequency signals
US6373007B1 (en) * 2000-04-19 2002-04-16 The United States Of America As Represented By The Secretary Of The Air Force Series and shunt mems RF switch
US6376787B1 (en) * 2000-08-24 2002-04-23 Texas Instruments Incorporated Microelectromechanical switch with fixed metal electrode/dielectric interface with a protective cap layer

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5642015A (en) * 1993-07-14 1997-06-24 The University Of British Columbia Elastomeric micro electro mechanical systems
US6020564A (en) * 1998-06-04 2000-02-01 Wang Electro-Opto Corporation Low-voltage long life electrostatic microelectromechanical system switches for radio-frequency applications

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO03107372A1 *

Also Published As

Publication number Publication date
CN1650382A (en) 2005-08-03
WO2003107372A1 (en) 2003-12-24
AU2002316298A1 (en) 2003-12-31
EP1535296A1 (en) 2005-06-01
CN1316531C (en) 2007-05-16

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Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

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17P Request for examination filed

Effective date: 20050111

AK Designated contracting states

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Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

AX Request for extension of the european patent

Extension state: AL LT LV MK RO SI

DAX Request for extension of the european patent (deleted)
A4 Supplementary search report drawn up and despatched

Effective date: 20070302

RIC1 Information provided on ipc code assigned before grant

Ipc: H01H 59/00 20060101ALI20070226BHEP

Ipc: H01L 21/00 20060101ALI20070226BHEP

Ipc: H01H 57/00 20060101AFI20040106BHEP

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20070531