US20020185003A1 - Electrostatic filter and a method thereof - Google Patents
Electrostatic filter and a method thereof Download PDFInfo
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- US20020185003A1 US20020185003A1 US10/166,582 US16658202A US2002185003A1 US 20020185003 A1 US20020185003 A1 US 20020185003A1 US 16658202 A US16658202 A US 16658202A US 2002185003 A1 US2002185003 A1 US 2002185003A1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
- B03C3/34—Constructional details or accessories or operation thereof
- B03C3/40—Electrode constructions
- B03C3/60—Use of special materials other than liquids
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
- B03C3/34—Constructional details or accessories or operation thereof
- B03C3/40—Electrode constructions
- B03C3/60—Use of special materials other than liquids
- B03C3/62—Use of special materials other than liquids ceramics
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S55/00—Gas separation
- Y10S55/39—Electrets separator
Definitions
- This invention relates generally to filters and, more particularly, an electrostatic filter and a method thereof.
- One existing type of particle filter uses a filtering material with a plurality of passages or pores through which the air or gas to be filtered is passed through. If particles in the gas or air are larger than the passages or pores in the filtering material, then the particles are trapped by the filtering material. These filters are rated according to the smallest size particles that they can effectively trap.
- Another type of particle filter is an electrostatic filter which uses an electret.
- the electret is a single sheet of material that holds a persistent or quasi-permanent electric charge in the sheet of material.
- the electrostatic filter with the electret operates by coulombic attraction between the electret and a particle or particles.
- a filter system in accordance with one embodiment of the present invention includes a housing defining a passage between an inlet and an outlet and one or more structures located in the passage in the housing.
- Each of the structures comprises two or more layers of insulating materials with an imbedded fixed charge located at at least one of the interfaces between the two or more layers.
- a filter system in accordance with another embodiment of the present invention includes a housing defining a passage between an inlet and an outlet and one or more structures located in the passage in the housing. At least one of the structures has an imbedded fixed charge at a charge level of at least 1 ⁇ 10 12 charges per cm 2 .
- a method for filtering one or more particles from a fluid in accordance with another embodiment of the present invention includes moving the fluid past one or more structures.
- Each of the one or more structures comprises two or more layers of insulating materials with an imbedded fixed charge located at at least one of the interfaces between the two or more layers.
- the one or more particles are attracted to at least one of the one or more structures and are trapped against the at least one of the one or more structures.
- a method for filtering one or more particles from a fluid in accordance with another embodiment of the present invention includes moving the fluid past one or more structures.
- Each of the one or more structures has an imbedded fixed charge at a charge level of at least 1 ⁇ 10 12 charges per cm 2 .
- the one or more particles are attracted to at least one of the one or more structures and are trapped against the at least one of the one or more structures.
- the present invention provides an electrostatic filter with lower energy requirements then prior filters. Since the passages in the filter are not restricted to the smallest size particles desired to be captured, energy requirements for moving the fluid through the filter are low. This represents a significant savings in energy cost.
- the present invention also provides more effective electrostatic filter.
- the present invention provides a significant improvement over electrets and other materials in stored charge density. As a result, the present invention is much more effective in attracting and filtering out particles from a fluid.
- the present invention also provides a filter that is easier to clean and reuse then prior filters. This represents a further cost savings to the end user of the filter.
- FIG. 1 is a perspective view of an electrostatic filter system in accordance with one embodiment of the present invention.
- FIG. 2 is a cross-sectional view of some of the sheets with an embedded fixed charge in the electrostatic filter system shown in FIG. 1.
- the filter system 10 includes a housing 12 with an inlet 14 and an outlet 16 and a plurality of filter sheets 18 ( 1 )- 18 ( 6 ) with imbedded fixed static charge.
- the present invention provides an electrostatic filter system 10 with lower energy requirements, better fixed charge holding capabilities, better filtering capabilities, and easier cleaning then prior filters.
- the housing 12 has walls 20 ( 1 )- 20 ( 4 ) which define a fluid passage 22 which extends between the inlet 14 and the outlet 16 , although the housing 12 could have other configurations, such as a curved or a bent configuration, with other numbers of walls 20 .
- the passage 22 in the housing 12 extends along in substantially the same direction, although the passage 22 could have other configurations, such as a curved or a bent shape.
- a housing 12 is shown, some embodiments of the present invention do not require a housing 12 , such as one with just one or more sheets 18 ( 1 )- 18 ( 6 ) which are placed in or adjacent a flow of fluid to be filtered.
- Opposing sides of the sheets 18 ( 1 )- 18 ( 6 ) are connected to the walls 20 ( 1 ) and 20 ( 3 ) of the housing 12 in a spaced apart array, although other configurations and connections to housing 12 could be used.
- the sheets 18 ( 1 )- 18 ( 6 ) are arranged to be substantially parallel to the direction of flow of the fluid, such as air or gas, from the inlet 14 to the outlet 16 of the housing 12 , although one or more of the sheets 18 ( 1 )- 18 ( 6 ) could be arranged in other directions with respect to the direction of flow of some or all of the fluid.
- the space between the sheets 18 ( 1 )- 18 ( 6 ) can be much larger then the size of the smallest particles to be filtered so less energy is required to move the fluid through the housing past the sheets 18 ( 1 )- 18 ( 6 ).
- Each of the sheets 18 ( 1 )- 18 ( 6 ) comprises a pair of layers 24 ( 1 ) and 24 ( 2 ) of insulating material such a dual dielectric thin film, which are formed or connected together at an interface 26 , although each of the sheets 18 ( 1 )- 18 ( 6 ) could comprise other numbers of layers with other numbers of interfaces depending on the number of layers.
- Other types of structures which can hold a fixed charge can also be used for sheets 18 ( 1 )- 18 ( 6 ) and these structures can have other shapes and configurations, such as a structure with fixed charge with passages in the structure for fluid to pass through and particles in the fluid to be attracted and attached to the walls of the holes.
- each of the sheets 18 ( 1 )- 18 ( 6 ) has an embedded fixed charge at the interface 26 and an electron trap density that is optimized for a high density of states with energy levels sufficiently below the conduction band minimum for extremely long trapped charge retention times.
- practical imbedded charge levels of at least 1 ⁇ 10 12 charge per cm 2 are easily obtainable.
- a dual insulator for one of the sheets 18 ( 1 ), 18 ( 2 ), 18 ( 3 ), 18 ( 4 ), 18 ( 5 ), or 18 ( 6 ) comprising a layer 24 ( 2 ) of Al 2 O 3 , although other insulators can be used, deposited on a layer 24 ( 1 ) of SiO 2 , although other insulators can be used, has a charge level of 5 ⁇ 10 12 charges per cm 2 , which is about a four hundred times increase in charge density over the electret disclosed in U.S. Pat. No. 6,214,094 to Rousseau et al.
- a sheet 18 ( 1 ), 18 ( 2 ), 18 ( 3 ), 18 ( 4 ), 18 ( 5 ), or 18 ( 6 ) with a fixed charge has a layer 24 ( 2 ) of silicon nitride deposited on a layer 24 ( 1 ) of silicon dioxide.
- the band gaps for these layers 24 ( 1 ) and 24 ( 2 ) of silicon nitride and silicon dioxide are approximately 5.0 eV and approximately 9.0 eV respectively.
- using sacrificial electrodes electrons tunnel into the conduction band of the layer 24 ( 1 ) of silicon dioxide and drift toward the layer 24 ( 2 ) of silicon nitride due to a high field.
- the band gap of silicon dioxide is very wide, the electron mobility is on the order of 1-10 cm 2 per volt-second.
- the electrons encounter interface states with energy levels approximately 1.0 eV below the conduction band of the layer 24 ( 2 ) of silicon nitride. These trap states at the interface 26 are quickly filled.
- the permittivity of the layer 24 ( 2 ) of silicon nitride is approximately twice that of the layer 24 ( 1 ) of silicon dioxide.
- a method for making the filter system 10 will be described with reference to FIGS. 1 and 2.
- the sheets 18 ( 1 )- 18 ( 6 ) are each fabricated.
- a layer 24 ( 2 ) of insulating material is deposited on another layer of insulating material 24 ( 1 ).
- a fixed charge is imbedded in each of the sheets 18 ( 1 )- 18 ( 6 ) and is held at an interface 26 for each of the sheets 18 (1)- 18 ( 6 ).
- a variety of techniques for imbedding the charge can be used, such as by applying a sufficient electrical bias across the layers 24 ( 1 ) and 24 ( 2 ) by utilizing conducting electrodes and conducting sacrificial layers on opposing sides of layers 24 ( 1 ) and 24 ( 2 ) or by injecting the electrons into the layers 24 ( 1 ) and 24 ( 2 ) to the interface 26 with an electron gun.
- the sheets 18 ( 1 )- 18 ( 6 ) are secured at opposing sides to an interior portion of the housing 12 .
- the sheets 18 ( 1 )- 18 ( 6 ) are arranged in an equally spaced apart array along the passage 22 .
- a fluid F such as air, gas or a liquid
- the fluid F travels along the passage 22 in the housing 12 towards the outlet 16 .
- the fluid F passes by the sheets 18 ( 1 )- 18 ( 6 ) with imbedded fixed charge at the interface 26 .
- the particle Due to random and chaotic motion of any particulate P in the fluid, air or gas, the particle is attracted to a nearest sheet 18 ( 1 ), 18 ( 2 ), 18 ( 3 ), 18 ( 4 ), 18 ( 5 ), or 18 ( 6 ) with imbedded static charge due to an induced charge in the particle P. If the particle P is a conductive particle, the induced charge is easily created. If the particle P is insulating in nature, the induced charge is a result of induced dipoles. In either case, the particle P will be strongly attracted to a charge imbedded sheet 18 ( 1 ), 18 ( 2 ), 18 ( 3 ), 18 ( 4 ), 18 ( 5 ), or 18 ( 6 ).
- the electrostatic filter 10 described herein is a passive filter, i.e. the filter itself requires no power.
- the filter 10 can be cleaned by placing them, for example, in a fluid flow cleaner system with sufficient flow. To dislodge the particles, the force due to the fluid flow on the attracted and attached particles P is greater than the electrostatic attraction forces. Therefore, the trapped particle P is dislodged and flushed away and the filter 10 is cleaned and ready for further filtering service.
Abstract
Description
- The present invention claims the benefit of U.S. Provisional Patent Application Serial No. 60/297,371, filed Jun. 11, 2001, which is hereby incorporated by reference in its entirety.
- This invention relates generally to filters and, more particularly, an electrostatic filter and a method thereof.
- There is an increasing need for effective particle filters. One existing type of particle filter uses a filtering material with a plurality of passages or pores through which the air or gas to be filtered is passed through. If particles in the gas or air are larger than the passages or pores in the filtering material, then the particles are trapped by the filtering material. These filters are rated according to the smallest size particles that they can effectively trap.
- Unfortunately, the ability to trap smaller particles requires smaller pore sizes for the filtering material which requires more energy to move the air or gas through the filter. As a result, the energy costs for filtering can become quite large when it becomes necessary to trap small particles.
- Another type of particle filter is an electrostatic filter which uses an electret. The electret is a single sheet of material that holds a persistent or quasi-permanent electric charge in the sheet of material. The electrostatic filter with the electret operates by coulombic attraction between the electret and a particle or particles.
- Unfortunately, there are limits on the obtainable charge in an electret. For example, U.S. Pat. No. 5,057,710 to Nishiura et al., which is herein incorporated by reference in its entirety, teaches at
col 4 lines 25-29 an electret with a charge density of up to 7×10−10 coulombs per cm2 which is equivalent to a charge level of 4.4×109 charges per cm2. In another example, U.S. Pat. No. 6,214,094 to Rousseau et al., which is herein incorporated by reference in its entirety, teaches at col. 22, lines 16-21, and FIGS. 13A and 13B an electret with a charge density of 2×10−5 coulombs per m2 which is equivalent to a charge level of 1.25×1010 charges per cm2. As a result, some of the particles in gas or air that pass through the electrostatic filter are not trapped by the electrets because the obtainable charge levels are too low. - A filter system in accordance with one embodiment of the present invention includes a housing defining a passage between an inlet and an outlet and one or more structures located in the passage in the housing. Each of the structures comprises two or more layers of insulating materials with an imbedded fixed charge located at at least one of the interfaces between the two or more layers.
- A filter system in accordance with another embodiment of the present invention includes a housing defining a passage between an inlet and an outlet and one or more structures located in the passage in the housing. At least one of the structures has an imbedded fixed charge at a charge level of at least 1×1012 charges per cm2.
- A method for filtering one or more particles from a fluid in accordance with another embodiment of the present invention includes moving the fluid past one or more structures. Each of the one or more structures comprises two or more layers of insulating materials with an imbedded fixed charge located at at least one of the interfaces between the two or more layers. The one or more particles are attracted to at least one of the one or more structures and are trapped against the at least one of the one or more structures.
- A method for filtering one or more particles from a fluid in accordance with another embodiment of the present invention includes moving the fluid past one or more structures. Each of the one or more structures has an imbedded fixed charge at a charge level of at least 1×1012 charges per cm2. The one or more particles are attracted to at least one of the one or more structures and are trapped against the at least one of the one or more structures.
- The present invention provides an electrostatic filter with lower energy requirements then prior filters. Since the passages in the filter are not restricted to the smallest size particles desired to be captured, energy requirements for moving the fluid through the filter are low. This represents a significant savings in energy cost.
- The present invention also provides more effective electrostatic filter. The present invention provides a significant improvement over electrets and other materials in stored charge density. As a result, the present invention is much more effective in attracting and filtering out particles from a fluid.
- The present invention also provides a filter that is easier to clean and reuse then prior filters. This represents a further cost savings to the end user of the filter.
- FIG. 1 is a perspective view of an electrostatic filter system in accordance with one embodiment of the present invention; and
- FIG. 2 is a cross-sectional view of some of the sheets with an embedded fixed charge in the electrostatic filter system shown in FIG. 1.
- Referring to FIGS. 1 and 2, an
electrostatic filter system 10 in accordance with one embodiment of the present invention is illustrated. Thefilter system 10 includes ahousing 12 with aninlet 14 and anoutlet 16 and a plurality of filter sheets 18(1)-18(6) with imbedded fixed static charge. The present invention provides anelectrostatic filter system 10 with lower energy requirements, better fixed charge holding capabilities, better filtering capabilities, and easier cleaning then prior filters. - Referring more specifically to FIGS. 1 and 2, the
housing 12 has walls 20(1)-20(4) which define afluid passage 22 which extends between theinlet 14 and theoutlet 16, although thehousing 12 could have other configurations, such as a curved or a bent configuration, with other numbers ofwalls 20. In this particular embodiment, thepassage 22 in thehousing 12 extends along in substantially the same direction, although thepassage 22 could have other configurations, such as a curved or a bent shape. Although ahousing 12 is shown, some embodiments of the present invention do not require ahousing 12, such as one with just one or more sheets 18(1)-18(6) which are placed in or adjacent a flow of fluid to be filtered. - Opposing sides of the sheets18(1)-18(6) are connected to the walls 20(1) and 20(3) of the
housing 12 in a spaced apart array, although other configurations and connections tohousing 12 could be used. The sheets 18(1)-18(6) are arranged to be substantially parallel to the direction of flow of the fluid, such as air or gas, from theinlet 14 to theoutlet 16 of thehousing 12, although one or more of the sheets 18(1)-18(6) could be arranged in other directions with respect to the direction of flow of some or all of the fluid. The space between the sheets 18(1)-18(6) can be much larger then the size of the smallest particles to be filtered so less energy is required to move the fluid through the housing past the sheets 18(1)-18(6). - Each of the sheets18(1)-18(6) comprises a pair of layers 24(1) and 24(2) of insulating material such a dual dielectric thin film, which are formed or connected together at an
interface 26, although each of the sheets 18(1)-18(6) could comprise other numbers of layers with other numbers of interfaces depending on the number of layers. Other types of structures which can hold a fixed charge can also be used for sheets 18(1)-18(6) and these structures can have other shapes and configurations, such as a structure with fixed charge with passages in the structure for fluid to pass through and particles in the fluid to be attracted and attached to the walls of the holes. In this particular embodiment, each of the sheets 18(1)-18(6) has an embedded fixed charge at theinterface 26 and an electron trap density that is optimized for a high density of states with energy levels sufficiently below the conduction band minimum for extremely long trapped charge retention times. With the present invention, practical imbedded charge levels, of at least 1×1012 charge per cm2 are easily obtainable. - By way of example only, a dual insulator for one of the sheets18(1), 18(2), 18(3), 18(4), 18(5), or 18(6) comprising a layer 24(2) of Al2O3, although other insulators can be used, deposited on a layer 24(1) of SiO2, although other insulators can be used, has a charge level of 5×1012 charges per cm2, which is about a four hundred times increase in charge density over the electret disclosed in U.S. Pat. No. 6,214,094 to Rousseau et al.
- By way of another example, a sheet18(1), 18(2), 18(3), 18(4), 18(5), or 18(6) with a fixed charge has a layer 24(2) of silicon nitride deposited on a layer 24(1) of silicon dioxide. The band gaps for these layers 24(1) and 24(2) of silicon nitride and silicon dioxide are approximately 5.0 eV and approximately 9.0 eV respectively. Under appropriate bias, using sacrificial electrodes electrons tunnel into the conduction band of the layer 24(1) of silicon dioxide and drift toward the layer 24(2) of silicon nitride due to a high field. Although the band gap of silicon dioxide is very wide, the electron mobility is on the order of 1-10 cm2 per volt-second. However, when the electrons arrive at the
interface 26, the electrons encounter interface states with energy levels approximately 1.0 eV below the conduction band of the layer 24(2) of silicon nitride. These trap states at theinterface 26 are quickly filled. The permittivity of the layer 24(2) of silicon nitride is approximately twice that of the layer 24(1) of silicon dioxide. Therefore, there is less band bending in the layer 24(2) of silicon nitride and trapped electrons do not have sufficient energy to tunnel into the conduction band of the layer 24(2) of silicon nitride, i.e., the traps are filled and remain filled. Once the electrical bias is removed, reverse tunneling is possible as long as the stored charge is sufficient to cause a band bending great enough for emptying a trap to the conduction band of the layer 24(1) of silicon dioxide conduction band. Taking into account filled trap densities, permittivities, and each component film thickness, a high level of trapped static charge is achievable in this particular example. - A method for making the
filter system 10 will be described with reference to FIGS. 1 and 2. The sheets 18(1)-18(6) are each fabricated. A layer 24(2) of insulating material is deposited on another layer of insulating material 24(1). Next, a fixed charge is imbedded in each of the sheets 18(1)-18(6) and is held at aninterface 26 for each of the sheets 18(1)-18(6). A variety of techniques for imbedding the charge can be used, such as by applying a sufficient electrical bias across the layers 24(1) and 24(2) by utilizing conducting electrodes and conducting sacrificial layers on opposing sides of layers 24(1) and 24(2) or by injecting the electrons into the layers 24(1) and 24(2) to theinterface 26 with an electron gun. - The sheets18(1)-18(6) are secured at opposing sides to an interior portion of the
housing 12. The sheets 18(1)-18(6) are arranged in an equally spaced apart array along thepassage 22. - The operation of the
filter system 10 will be described with reference to FIGS. 1 and 2. A fluid F, such as air, gas or a liquid, is directed into theinlet 14 of thehousing 12. The fluid F travels along thepassage 22 in thehousing 12 towards theoutlet 16. As the fluid F travels down thepassage 22, the fluid F passes by the sheets 18(1)-18(6) with imbedded fixed charge at theinterface 26. - Due to random and chaotic motion of any particulate P in the fluid, air or gas, the particle is attracted to a nearest sheet18(1), 18(2), 18(3), 18(4), 18(5), or 18(6) with imbedded static charge due to an induced charge in the particle P. If the particle P is a conductive particle, the induced charge is easily created. If the particle P is insulating in nature, the induced charge is a result of induced dipoles. In either case, the particle P will be strongly attracted to a charge imbedded sheet 18(1), 18(2), 18(3), 18(4), 18(5), or 18(6). Because the electrostatic attraction is effective for a tremendous range of particle size, the spacing between the sheets 18(1)-18(6) need not be highly restrictive to air or gas flow. This results in a very significant energy savings and reduction in the overall cost of maintaining a highly effective air or gas filtering system. Furthermore, the
electrostatic filter 10 described herein is a passive filter, i.e. the filter itself requires no power. - By choosing the appropriate charge density and materials properties, the
filter 10 can be cleaned by placing them, for example, in a fluid flow cleaner system with sufficient flow. To dislodge the particles, the force due to the fluid flow on the attracted and attached particles P is greater than the electrostatic attraction forces. Therefore, the trapped particle P is dislodged and flushed away and thefilter 10 is cleaned and ready for further filtering service. - Having thus described the basic concept of the invention, it will be rather apparent to those skilled in the art that the foregoing detailed disclosure is intended to be presented by way of example only, and is not limiting. Various alterations, improvements, and modifications will occur and are intended to those skilled in the art, though not expressly stated herein. These alterations, improvements, and modifications are intended to be suggested hereby, and are within the spirit and scope of the invention. Additionally, the recited order of processing elements or sequences, or the use of numbers, letters, or other designations therefor, is not intended to limit the claimed processes to any order except as may be specified in the claims. Accordingly, the invention is limited only by the following claims and equivalents thereto.
Claims (23)
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US10/166,582 US6773488B2 (en) | 2001-06-11 | 2002-06-07 | Electrostatic filter and a method thereof |
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US29737101P | 2001-06-11 | 2001-06-11 | |
US10/166,582 US6773488B2 (en) | 2001-06-11 | 2002-06-07 | Electrostatic filter and a method thereof |
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US9440241B2 (en) | 2008-11-05 | 2016-09-13 | Fmc Technologies, Inc. | Electrostatic coalescer with resonance tracking circuit |
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Also Published As
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WO2002100551A1 (en) | 2002-12-19 |
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