WO2002097865A3 - Fluidic valves, agitators, and pumps and methods thereof - Google Patents

Fluidic valves, agitators, and pumps and methods thereof Download PDF

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Publication number
WO2002097865A3
WO2002097865A3 PCT/US2002/017247 US0217247W WO02097865A3 WO 2002097865 A3 WO2002097865 A3 WO 2002097865A3 US 0217247 W US0217247 W US 0217247W WO 02097865 A3 WO02097865 A3 WO 02097865A3
Authority
WO
WIPO (PCT)
Prior art keywords
opening
openings
agitators
pumps
methods
Prior art date
Application number
PCT/US2002/017247
Other languages
French (fr)
Other versions
WO2002097865A2 (en
WO2002097865A9 (en
Inventor
Michael D Potter
Original Assignee
Rochester Inst Tech
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rochester Inst Tech filed Critical Rochester Inst Tech
Priority to AU2002303933A priority Critical patent/AU2002303933A1/en
Publication of WO2002097865A2 publication Critical patent/WO2002097865A2/en
Publication of WO2002097865A3 publication Critical patent/WO2002097865A3/en
Publication of WO2002097865A9 publication Critical patent/WO2002097865A9/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0005—Lift valves
    • F16K99/0007—Lift valves of cantilever type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0015—Diaphragm or membrane valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0051—Electric operating means therefor using electrostatic means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/008—Multi-layer fabrications
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/0094—Micropumps

Abstract

A valve (10(1) or 10(2)) which has a structure with at least one opening (14(1) or 14(2)) and a member (16) which has a fixed static charge and also has a first position exposing the opening (14(1) or 14(2)) and a second position sealing the opening (14(1) or 14(2)). A method for making the valve (10(1) or 10(2)) includes providing a structure (12(1)) with at least one opening (14(1) or 14(2)) and providing a member (16) having a fixed static charge when the member (16) has a first position exposing the opening (14(1) or 14(2)) and a second position sealing the opening (14(1) or 14(2)). A pump (50) includes a base with at least one trench (52), a structure (12(1)) with at least two openings (14(1) or 14(2)), a membrane (16(3) or 16(4)) with a fixed static charge, a first cantilever (16(1)) arm having a fixed static charge. The first cantilever arm (16(1)) has a first position exposing one of the openings (14(1) or 14(2)) and a second position sealing the one of the openings (14(1) or 14(2)). The second cantilever arm (16(2)) has a first position exposing another one of the openings (14(1) or 14(2)) and a second position sealing another one of the openings (14(1) or 14(2)).
PCT/US2002/017247 2001-05-31 2002-05-31 Fluidic valves, agitators, and pumps and methods thereof WO2002097865A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2002303933A AU2002303933A1 (en) 2001-05-31 2002-05-31 Fluidic valves, agitators, and pumps and methods thereof

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US29491201P 2001-05-31 2001-05-31
US60/294,912 2001-05-31

Publications (3)

Publication Number Publication Date
WO2002097865A2 WO2002097865A2 (en) 2002-12-05
WO2002097865A3 true WO2002097865A3 (en) 2003-08-28
WO2002097865A9 WO2002097865A9 (en) 2004-07-08

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2002/017247 WO2002097865A2 (en) 2001-05-31 2002-05-31 Fluidic valves, agitators, and pumps and methods thereof

Country Status (3)

Country Link
US (1) US7195393B2 (en)
AU (1) AU2002303933A1 (en)
WO (1) WO2002097865A2 (en)

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